<  >>x G> ??TopBottomPadsViasUnroutedDimensiontPlacebPlacetOriginsbOriginstNamesbNamestValuesbValuestStopbStop tCream bCream!"tFinish"!bFinish#$tGlue$#bGlue%&tTest&%bTest'( tKeepout(' bKeepout)* tRestrict*) bRestrict++ vRestrict,,Drills--Holes..Milling//Measures00Document11Reference34tDocu43bDocu[[Nets\\Busses]]Pins^^Symbols__Names``ValuesRoute14Route15Route2Route3Route4Route5Route6Route7Route8 Route9 Route10 Route11 Route12 Route13&@K7ICVDIL46''<6IS<-G$17ICjDIL66''<6C/4<6%S<-G$17IC~DIL86''<6&S<-G$17ICDIL106''<-8cG$17ICDIL146''<6'S<-G$17ICDIL166''<!"'(#$&%)*+,-./06(S<!"%&#$'()*+,-./0-G$17ICDIL186''<!"'(#$&%)*+,-./0126)S<!"%&#$'()*+,-./012-G$17ICDIL206''<!"'(#$&%)*+,-./012346*S<!"%&#$'()*+,-./01234-G$17ICDIL226;-4<!"#$%&'()*+,-./01234566:-3<!"#$%&'()*+,-./012345665S-3<!"'(#$&%)*+,-./0123456- G$17 IC DIL2469-3<!"#$%&'()*+,-./0123456<786<-4<!"#$%&'()*+,-./0123456<7867-6<!"#$%&'()*+,-./0123456<786=-9<!"#$%&'()*+,-./0123456<78- G$17 ICDIL2868''<!"#$%&'()*+,-./0123456<789:;<6-3<!"'(#$&%)*+,-./0123456<789:;<6#-4<!"'(#$&%)*+,-./0123456<789:;<- G$17IC2DIL326 ''<ABGHCDFEIJKLMNOPQRSTUV<WXYZ[\]^_`- G$17ICFDIL406 ''<ABGHCDFEIJKLMNOPQRSTUV<WXYZ[\]^_`abcdefgh- G$17ICZDIL686H''<<<<-G$17ICnDIL646B''<<<6EYL<<<-G$17IC6''<-G$17IC6''<-G$17IC6A''<-G$17IC6@''<-G$17IC 6D''<-G$17IC3DIL426G''<ABCDEFGHIJKLMNOPQRSTUV<WXYZ[\]^_`abcdefghij-G$17ICGDIL486''<ABCDEFGHIJKLMNOPQRSTUV<WXYZ[\]^_`abcdefghijkl<mnop-G$17IC[SIP146?''<-G$17ICqSIP206F''<!"#$%&'()*+,-./01234-G$17ICSIP246>''<!"#$%&'()*+,-./0123456<78-G$17ICDIL26''<-G$1% - DIL4,@X8c1,@XȜ2,@)Ȝ3,@)8c4"0^9Ԕ9,k"0^9,kp,k"0^p,kpԔ"0^pԔ8cԔ"0^9ԔȜԔ"0^ȜԔ8cԔ 1_^R" >NAME1`^R" >VALUE- DIL8,@X8c1,@X2,@XȜ3,@X94"^9Ԕ9"^9p"^ppԔ"^pԔ8cԔ"^9ԔȜԔ"^ȜԔ8cԔ 1_^R" >NAME1`^R" >VALUE,@)95,@)Ȝ6,@)7,@)8c8- DIL6,@X8c1,@X2,@XȜ3,@)Ȝ4"^9Ԕ9,k"^9,kp,k"^p,kpԔ"^pԔ8cԔ"^9ԔȜԔ"^ȜԔ8cԔ 1_^R" >NAME1`^R" >VALUE,@)5,@)8c6-* DIL10,@X8c1,@X2,@XȜ3,@X94"^9Ԕ9"^9p"^ppԔ"^pԔ8cԔ"^9ԔȜԔ"^ȜԔ8cԔ 1_^R" >NAME1`^RA" >VALUE,@XX5,@)X6,@)97,@)Ȝ8,@)9,@)8c10-*DIL14,@X)1,@Xp2,@X8c3,@X4"^9D[9"^9p"^ppD["^pD[8cD["^9D[ȜD["^ȜD[8cD[ 1_^Rt" >NAME1`^RA" >VALUE,@XȜ5,@X96,@XX7,@)X8,@)99,@)Ȝ10,@)11,@)8c12,@)p13,@))14-DIL16,@X)1,@Xp2,@X8c3,@X4"^9D[9A"^9ApA"^pApD["^pD[8cD["^9D[ȜD["^ȜD[8cD[ 1_^Rt" >NAME1`^RL" >VALUE,@XȜ5,@X96,@XX7,@X s8,@) s9,@)X10,@)911,@)Ȝ12,@)13,@)8c14,@)p15,@))16-4DIL18,@X1,@X)2,@Xp3,@X8c4"^9|9A"^9ApA"^pAp|"^p|8c|"^9|Ȝ|"^Ȝ|8c| 1_^RJ">NAME1`^RL" >VALUE,@X5,@XȜ6,@X97,@XX8,@X s9,@) s10,@)X11,@)912,@)Ȝ13,@)14,@)8c15,@)p16,@))17,@)18-c4DIL20,@X1,@X)2,@Xp3,@X8c4"^9|9L"^9LpL"^pLp|"^p|8c|"^9|Ȝ|"^Ȝ|8c| 1_^RJ" >NAME1`^R{" >VALUE,@X5,@XȜ6,@X97,@XX8,@X s9,@X10,@)11,@) s12,@)X13,@)914,@)Ȝ15,@)16,@)8c17,@)p18,@))19,@)20-cDIL22,@X1,@X2,@X)3,@Xp4"^9!9L"^9LpL"^pLp!"^p!8c!"^9!Ȝ!"^Ȝ!8c! 1_^R:" >NAME1`^R{" >VALUE,@X8c5,@X6,@XȜ7,@X98,@XX9,@X s10,@X11,@)12,@) s13,@)X14,@)915,@)Ȝ16,@)17,@)8c18,@)p19,@))20,@)21,@)22 -cDIL24,@XPS1,@X2,@X3,@X)4"^99L"^9LpL"^pLp"^p8c"^9Ȝ"^Ȝ8c 1_^R" >NAME1`^R{" >VALUE,@Xp5,@X8c6,@X7,@XȜ8,@X99,@XX10,@X s11,@X12,@)13,@) s14,@)X15,@)916,@)Ȝ17,@)18,@)8c19,@)p20,@))21,@)22,@)23,@)PS24$-DIL28,@XPS1,@X2,@X3,@X)4"^99"^9p"^pp"^p8c"^9Ȝ"^Ȝ8c 1_^R" >NAME1`^R" >VALUE,@Xp5,@X8c6,@X7,@XȜ8,@X99,@XX10,@X s11,@X12,@X13,@XxI14,@)xI15,@)16,@)17,@) s18,@)X19,@)920,@)Ȝ21,@)22,@)8c23,@)p24,@))25,@)26,@)27,@)PS28(-:^DIL32,@X1,@XPS2,@X3,@X4"^9$9"^9p"^pp$"^p$8c$"^9$Ȝ$"^Ȝ$8c$ 1_^R" >NAME1`^RlQ" >VALUE,@X)5,@Xp6,@X8c7,@X8,@XȜ9,@X910,@XX11,@X s12,@X13,@X14,@XxI15,@X@16,@)@17,@)xI18,@)19,@)20,@) s21,@)X22,@)923,@)Ȝ24,@)25,@)8c26,@)p27,@))28,@)29,@)30,@)PS31,@)320-s$DIL40,@X|1,@X2,@X3,@XPS4"^994"^94p4"^p4p"^p8c"^9Ȝ"^Ȝ8c 1_^Rb" >NAME1`^R" >VALUE,@X5,@X6,@X)7,@Xp8,@X8c9,@X10,@XȜ11,@X912,@XX13,@X s14,@X15,@X16,@XxI17,@X@18,@X19,@X20,@)21,@)22,@)@23,@)xI24,@)25,@)26,@) s27,@)X28,@)929,@)Ȝ30,@)31,@)8c32,@)p33,@))34,@)35,@)36,@)PS37,@)38,@)39,@)|408-DIL48,@XhC1,@X02,@X|3,@X4"^9u9'"^9'p'"^p'pu"^pu8cu"^9uȜu"^Ȝu8cu 1_^Rҍ">NAME1`^R" >VALUE,@X5,@XPS6,@X7,@X8,@X)9,@Xp10,@X8c11,@X12,@XȜ13,@X914,@XX15,@X s16,@X17,@X18,@XxI19,@X@20,@X21,@X22,@X23,@X`Y24,@)`Y25,@)26,@)27,@)28,@)@29,@)xI30,@)31,@)32,@) s33,@)X34,@)935,@)Ȝ36,@)37,@)8c38,@)p39,@))40,@)41,@)42,@)PS43,@)44,@)45,@)|46,@)047,@)hC48L-DIL68,@X31,@XH2,@Xm3,@X 4"^9e97"^97p7"^p7pe"^pe8ce"^9eȜe"^Ȝe8ce 1_^R}" >NAME1`^Rt" >VALUE,@X5,@XhC6,@X07,@X|8,@X9,@X10,@XPS11,@X12,@X13,@X)14,@Xp15,@X8c16,@X17,@XȜ18,@X919,@XX20,@X s21,@X22,@X23,@XxI24,@X@25,@X26,@X27,@X28,@X`Y29,@X(30,@X31,@X/32,@X33,@XHi34,@)Hi35,@)36,@)/37,@)38,@)(39,@)`Y40,@)41,@)42,@)43,@)@44,@)xI45,@)46,@)47,@) s48,@)X49,@)950,@)Ȝ51,@)52,@)8c53,@)p54,@))55,@)56,@)57,@)PS58,@)59,@)60,@)|61,@)062,@)hC63,@)64,@) 65,@)m66,@)H67,@)368H- xDIL64,@XH1,@Xm2,@X 3,@X4"^99"^9p"^pp"^p8c"^9Ȝ"^Ȝ8c 1_^R" >NAME1`^R7" >VALUE,@XhC5,@X06,@X|7,@X8,@X9,@XPS10,@X11,@X12,@X)13,@Xp14,@X8c15,@X16,@XȜ17,@X918,@XX19,@X s20,@X21,@X22,@XxI23,@X@24,@X25,@X26,@X27,@X`Y28,@X(29,@X30,@X/31,@X32,@)33,@)/34,@)35,@)(36,@)`Y37,@)38,@)39,@)40,@)@41,@)xI42,@)43,@)44,@) s45,@)X46,@)947,@)Ȝ48,@)49,@)8c50,@)p51,@))52,@)53,@)54,@)PS55,@)56,@)57,@)|58,@)059,@)hC60,@)61,@) 62,@)m63,@)H64 -*DIL14/4,@X)1"^9D[9"^9p"^ppD["^pD[8cD["^9D[ȜD["^ȜD[8cD[ 1_^Rt">NAME1`^RA">VALUE,@XX7,@)X8,@))14-*DIL14/8,@X)1,@Xp2"^9D[9"^9p"^ppD["^pD[8cD["^9D[ȜD["^ȜD[8cD[ 1_^Rt" >NAME1`^RA" >VALUE,@X96,@XX7,@)X8,@)99,@)p13,@))14 -DIL16/4,@X)1"^9D[9A"^9ApA"^pApD["^pD[8cD["^9D[ȜD["^ȜD[8cD[ 1_^Rt" >NAME,@X s8,@) s9,@))161`^RL" >VALUE-DIL16/8,@X)1,@Xp2"^9D[9A"^9ApA"^pApD["^pD[8cD["^9D[ȜD["^ȜD[8cD[ 1_^Rt" >NAME,@XX7,@X s8,@) s9,@)X10,@)p15,@))161`^RL" >VALUE-DIL16/8B,@X)1,@X4"^9D[9A"^9ApA"^pApD["^pD[8cD["^9D[ȜD["^ȜD[8cD[ 1_^Rt" >NAME,@X96,@X s8,@) s9,@)911,@)13,@))161`^RL" >VALUE2-DIL42,@XhC1,@X02,@X|3,@X4"^9u9lQ"^9lQplQ"^plQpu"^pu8cu"^9uȜu"^Ȝu8cu 1_^Rҍ" >NAME1`^R4" >VALUE,@X5,@XPS6,@X7,@X8,@X)9,@Xp10,@X8c11,@X12,@XȜ13,@X914,@XX15,@X s16,@X17,@X18,@XxI19,@X@20,@X21,@)22,@)@23,@)xI24,@)25,@)26,@) s27,@)X28,@)929,@)Ȝ30,@)31,@)8c32,@)p33,@))34,@)35,@)36,@)PS37,@)38,@)39,@)|40,@)041,@)hC42-ZIP14,@XPS1,@X2,@Xp3,@X4"^99"^9TW"^TW"^p"^pp1_4~" >NAME1`>" >VALUE,@X95,@X s6,@X7,@)xI8,@)9,@)X10,@)Ȝ11,@)8c12,@))13,@)14"^9@a"^@a"^p"^"^tE"^tEtE!-VBZIP20,@X|1,@X2,@X3,@X)4"^994"^94TWp"^TWpp"^pp4"^p4p1_4&" >NAME1`>8m" >VALUE,@X8c5,@XȜ6,@XX7,@X8,@XxI9,@X10,@)11,@)@12,@)13,@) s14"^9@aD"^@aDD"^Dp"^X"^tE"^tEtEX,@)915,@)16,@)p17,@)18,@)PS19,@)20%-BZIP24,@X|1,@X2,@X3,@X)4"^99Ta"^9TaTWC"^TWCC"^CpTa"^pTap1_4&" >NAME1`>X" >VALUE,@X8c5,@XȜ6,@XX7,@X8,@XxI9,@X10,@X11,@X(12,@)13,@)`Y14"^9@aD"^@aDD"^Dp"^X"^tE"^tEtEX,@)15,@)@16,@)17,@) s18,@)919,@)20,@)p21,@)22,@)PS23,@)24 -JDIL2,@X1,@)2"0^919x"0^9xpx"0^pxp1"2^p1tE1"0^911"2^16tE1 1_^RjJ" >NAME1`^R@a" >VALUEK |DIL04*d,k1*1,k2*1Ԕ3*dԔ4"8crȜr"Ȝ8c"8cr8c"ȜrȜ'"ȜȜP"Ȝ'ȜP|1(>VALUE1җ(>NAMEJ|5DIL06*Ȝ,k1*,k2*Ԕ5*ȜԔ6*8c,k3*8cԔ4"Ԕr,kr",kԔ"ԔrԔ",kr,k'",k,kP",k',kP|12(>VALUE1@a(>NAME||QDIL08*,k,k1*d,k2*dԔ7*,kԔ81/(>NAME*1,k3*Ԕ,k4*1Ԕ6*ԔԔ51u2(>VALUE"pr9r"9p"prp"9r9'"99P"9'9P||mDIL14*X,k1*9,k2*),k7*)Ԕ81(>NAME*Ȝ,k3*,k4*p,k6*8c,k512(>VALUE*pԔ9*8cԔ10*Ԕ11*ȜԔ12*9Ԕ13*XԔ14"lGrr"lG"lGrlG"r'"P"'P|B|DIL16*,k1*,k2* ,k7*D[,k81>d(>NAME*,k,k3*d,k4*Ԕ,k6*1,k51N2(>VALUE*D[Ԕ9* Ԕ10*ԔԔ11*1Ԕ12*dԔ13*,kԔ14*Ԕ15*Ԕ16"r sr" s"r" sr s'" s sP" s' sP|t|DIL18* s,k1*X,k2*p,k7*),k817(>NAME*9,k3*Ȝ,k4*8c,k6*,k512(>VALUE*,k9*Ԕ10*)Ԕ11*pԔ12*8cԔ13*Ԕ14*ȜԔ15*9Ԕ16*XԔ17* sԔ18"|rAr"A|"|r|"ArA'"AAP"A'AP|[|DIL20*A,k1*,k2*Ԕ,k7* ,k81 >NAME*,k3*,k,k4*1,k6*d,k51 >VALUE*D[,k9*|,k10*|Ԕ11*D[Ԕ12* Ԕ13*ԔԔ14*1Ԕ15*dԔ16*,kԔ17*Ԕ18*Ԕ19*AԔ20"rr""r"r'"P"'P| |DIL24S*L,k1*A,k2*1,k7*Ԕ,k81Ģ(>NAME*,k3*,k4*d,k6*,k,k51<(>VALUE* ,k9*D[,k10*|,k11*!,k12*!Ԕ13*|Ԕ14*D[Ԕ15* Ԕ16*ԔԔ17*1Ԕ18*dԔ19*,kԔ20*Ԕ21*Ԕ22*AԔ23*LԔ24"0PSrr"0PS"0PSrPS"0r'"0P"0'P| DIL24*LX1*AX2*1X7*ԔX81Ģ"(>NAME*X3*X4*dX6*,kX51zFF"(>VALUE* X9*D[X10*|X11*!X12*!)13*|)14*D[)15* )16*Ԕ)17*1)18*d)19*,k)20*)21*)22*A)23*L)24"'"P"'P|"PS"PSPS"PS$lDIL28*{X1*LX2*dX7*1X81:" >NAME*AX3*X4*,kX6*X51F" >VALUE*ԔX9* X10*D[X11*|X12*!X13*X14*)15*!)16*|)17*D[)18* )19*Ԕ)20*1)21*d)22*,k)23*)24*)25*A)26*L)27*{)28"xI"xI""xIxI'"xIxIP"xI'xIP|(17DIL32*X1*{X2*,kX7*dX81^" >NAME*LX3*AX4*X6*X512lF" >VALUE*1X9*ԔX10* X11*D[X12*|X13*!X14*X15*$X16*$)17*)18*!)19*|)20*D[)21* )22*Ԕ)23*1)24*d)25*,k)26*)27*)28*A)29*L)30*{)31*)32"@"@""@@'"@@P"@'@P|0kSDIL40*lQX1*X2*X7*X81 " >NAME*X3*{X4*AX6*LX51FbP" >VALUE*,kX9*dX10*1X11*ԔX12* X13*D[X14*|X15*!X16*X17*$X18*\KX19*X20*)21*\K)22*$)23*)24*!)25*|)26*D[)27* )28*Ԕ)29*1)30*d)31*,k)32*)33*)34*A)35*L)36*{)37*)38*)39*lQ)40"0"0"00"""Z""Z|zJ{xo")))")X "X XX")XXX")X))"^R|"%z^R"%%"%^Rz"3z^R^R"3^R"3"3^R"3^R^R"^R"F"F^RF"3F^R^R"3^R"3"3^R"3^R"^R"""^R""~@"~@^R~@"3~@^RVT^R"3VTVT^R"3VTr"3r^Rr"r^R^R"H"HH"H"3r"3rr"3rVT"3VTVT"3VT~@"~@~@"~@"""""3""3"3"3"3F"FF"F""3"3"3"3"^R"3^Rz^R"3^R"3"3^R"3^R^R"^R"F"^RFF"3^RF^R"3^R"3"3^R"3^R^R"""^R"""~@"^R~@~@"3^R~@^RVT"3VT^RVT"3VTr"3^Rrr"3^Rr^R|"3r"3rr"3rVT"3VTVT"3VT~@"~@~@"~@"""""3""3"3"3"3F"FF"F""3"3"3"3"3"12 "1 "2 "21 *p1*8c2*Ȝp3*98c4*Ȝ8c5*96*Ȝ7*9Ȝ8*Ȝ99*ȜȜ10*911*Ȝ12*8c913*pȜ14*8cȜ15*p16*8c17*p8c18*8cp19*8c8c2018(>VALUE18(>NAME|"D[D[XD["XD[)")"D["D[D[D[" ^R>"lrH "ll"l rH"3rH J\ "3J\lJ\ "3J\lzl"3z zl"3z "l "ll" l"3 "3l "3lFl"3F Fl"3F  "l "ll" l"3 " "3"l" "3"l~@l"3~@ ~@l"3~@ VT "VTlVT "VTlrl"r rl"3r "3l "3ll"3 l" > "3 >"3  3" 3>"3>>"33>"333"3>3"3>>r"3r>r"3r3VT">VT3VT"3>VT>~@"33~@>~@"33~@3""3>"3""3>">"3>"33">3"3>>F"33F>F"33F3"3>3"3>>"3>"33">3"3>>z"33z>z"33z3J\"3>J\3J\">J\> "3 rH J\"3lJ\ J\"3lJ\lz"3 zlz"3 z "l "ll" l"3 "3l "3llF"3 FlF"3 F "l "ll" l"3  ""3l" ""3l"l~@"3 ~@l~@"3 ~@ VT"lVT VT"lVTlr" rlr"3 r "3l "3ll"3 l"3 "3>>"33>"333"3>3"3>r>"r3r>"r3VT3"VT>VT3"3VT>~@>"3~@3~@>"3~@3"3"3">"3"3">>"3>"33">3"3>F>"3F3F>"3F33"3>3"3>>"3>"33">3"3>z>"3z3z>"3z3J\3"3J\>J\3"3J\>^R>*1Ԕ1*d 2*dԔ3*,k 4*Ԕ5*,kԔ6*17*,k18*d9*,kd10*,k11*,k12*,k,k13*d14*d,k15*116*1,k17*Ԕ18* ,k19*Ԕ,k20* d21*Ԕd22* 123*Ԕ124* Ԕ25*Ԕ 26*ԔԔ27*1 28%3Ȝ8c11%38c8c11%3ȜȜ11%38cȜ11"H|"Hz "z2z "2zH 1&j(>VALUE1X&j(>NAMES|"D[X"XD["D[ s"D[ s s"D[ sD[" >^R"КrH&"Кl"l "3rH&J\&"3J\КJ\&"3J\КzК"3z&zК"3z&&"К&"КК"&К"3&&"3К&"3КFК"3F&FК"3F&&"К&"КК"&К"3&"&"3"К"&"3"К~@К"3~@&~@К"3~@&VT&"VTКVT&"VTКrК"r&rК"3r&&"3К&"3КК"3&К"&>&"3=>*"3= 0e" 0e"3>*>R"33R>R"33R3"3>3"3>>"3>"33">3"3>>r"33r>r"3>3"3>>F"3F>F"3F3">3"3>>"33>"333"3>3"3>>z"3z>z"3z3J\">J\3J\"3>J\>rH"33rH>rH"33rH3*"3>*3*">*>&"3  *"3l* *"3l*lrH"3 rHlrH"3 rH J\"lJ\ J\"lJ\lz" zlz"3 z "3l "3ll"3 l"3 "l "llF" FlF"3 F "3l "3 rlr"3 r "l "ll" l"3 "3l "3llR"3 RlR"3 R >"3"30e"30e0e"30e"3r"r0er"r0eVT0e"VTVT0e"3VT~@"3~@0e~@"3~@0e"0e"3""0e"3""0e"0e0e"0e"3F"3F0eF"3F0e0e"30e"3"0e"0e0e"0e"3z"3z0ez"3z0eJ\0e"3J\J\0e"3J\^R*1p1*d)2*dp3*,k)4*p5*,kp6*8c7*,k8c8*9*,k10*Ȝ11%3Ȝ8c11%38c8c11%3ȜȜ11%38cȜ11"" " 2 "2  *,kȜ12*913*,kX14*,k915*dX16*d917*1X18*1919*ԔX20* 921*Ԕ922* Ȝ23*ԔȜ24* 25*Ԕ26* 8c27*Ԕ8c28* p29*Ԕ)30*Ԕp31*1)32"33r3VT"3>VT3VT"3>VT>~@"3~@>~@"3~@3"">"3""3>">"33>"333"3ll"3 l"3  ""l" ""l"l~@" ~@l~@"3 ~@ VT"3lVT VT"3lVTlr1›(>VALUE1X›(>NAME!!/"|| s|" s|A"AAA"|AAA"|A||"&vB"4i:"4i4i"4i:"3:"34i"34i4i"34i"3*"*4i*"*4irH4i"rHrH4i"3rHJ\"3J\4iJ\"3J\4iz4i"3zz4i"3z"4i"4i4i"4i"3"34i"34iF4i"3FF4i"3F"4i"4i4i"4i"3""3"4i""3"4i~@4i"3~@~@4i"̖ovB"̖oo̖"o̖vB"3vBvB"3̖vB"3̖̖*"3vB*̖*"3vB*vBR"̖RvBR"̖R̖"vB̖"3vBvB"3̖vB"3̖̖"3vB̖"3vBvBr"̖rvBr"̖r̖VT"vBVT̖VT"3vBVTvB~@"3̖~@vB~@"3̖~@̖""3vB"̖""3vB"vB"̖vB"̖̖"vB̖"3vBvBF"3̖FvBF"3̖F̖"3vB̖"3:"34i"34i4i"34i"3*"4i**"4i*4irH"rH4irH"3rHJ\"34iJ\J\"34iJ\4iz"3z4iz"3z"4i"4i4i"4i"3"34i"34i4iF"3F4iF"3F"4i"4i4i"4i"3""34i"""34i"4i~@"3~@4i~@"3vBvB"3̖vB"3̖*̖"3*vB*̖"3*vBRvB"R̖RvB"R̖̖"vB̖"3vBvB"3̖vB"3̖̖"3vB̖"3vBrvB"r̖rvB"r̖VT̖"VTvBVT̖"3VTvB~@vB"3~@̖~@vB"3~@̖"̖"3"vB"̖"3"vBvB"̖vB"̖̖"vB̖"3vBFvB"3F̖FvB"3F̖̖"3vB̖*1 1*dD[2*d 3*,kD[4%Ȝ8c11%8c8c11%ȜȜ11%8cȜ11"p| "p "2 "2p"3vBvB"̖vB"̖̖"vB̖"3vBzvB"3z̖zvB"3z̖J\̖"3J\vBJ\̖"3J\vBrHvB"rH̖rHvB"rH̖*̖"*vB*̖"3*vBvB"3̖vB"3̖̖"3vB̖"3~@VT"VT4iVT"VT4ir4i"rr4i"3r"34i"34i4i"34i"3"4i"4iR4i"RR4i"3R*"3*4i*"3*4i4i"34i"34i"34i4i*"3*4i*"3*R"4iRR"4iR4i"4i"3"34i"34i4i"34i"3r"4irr"4ir4iVT"VT4iVT"3̖vB"3̖̖"3vB̖"3vBvB*"̖*vB*"̖*̖rH"vBrH̖rH"3vBrHvBJ\"3̖J\vBJ\"3̖J\̖z"3vBz̖z"3vBzvB"̖vB"̖̖"vB̖"vB"vBvB"3vBvB"3&vBvB"3"3VT~@*,k 5*D[6* 7* 8*Ԕ9*Ԕ10*111*112*d13*d14*,k15*,k16*17*18*19*,k20*,k21*d22*d23*124*125*Ԕ26*Ԕ27* 28*D[29* 30*D[,k31* ,k32*D[d33* d34*D[135* 136*D[Ԕ37* Ԕ38*D[ 39* D[40* 41*ԔD[42*Ԕ 43*1D[441T"(>VALUE1 sT"(>NAME\D;"A"A|"|"""vBt"H_7"H_77H_"7H_"3v"3v7v"3v7:7"3::7"3*7*"3*7rH7"3rHrH7"3rHJ\"J\7J\"J\7z7"zz7"3z"37"377"37"3"7"7F7"FF7"3F"37"377"37"3"""7"""7~@7"~@~@7"htbL"hh"hbLt"3tbLt8"3h8t8"3h8h"3th"3hRtR"3hRh"3th"3tt"ht"hh"th"3ttr"3hrtr"3hrhVT"3tVThVT"3tVTt~@"h~@t~@"h~@h""t"h""3t"t"3ht"3hh"3th"3ttF"hFtF"hFh"th"3v"37vv"37v7:"3:7:"37**"37*7rH"3rH7rH"3rHJ\"7J\J\"7J\7z"z7z"3z"37"377"37"3"7"77F"F7F"3F"37"377"37"3""7"""7"7~@"~@7~@"3bLt8t"38h8t"38hh"3th"3RhRt"3Rhh"3th"3tt"ht"hh"th"3trt"3rhrt"3rhVTh"3VTtVTh"3VTt~@t"~@h~@t"~@h"h""t"h"3"tt"3ht"3hh"3th"3tFt"FhFt"Fhh"th*1*)2*Ȝ3*Ȝ)4%Ȝ8c11%8c8c11%ȜȜ11%8cȜ11"p| "p "2 "2p "3tt"3ht"3hh"3th"3tzt"zhzt"zhJ\h"J\tJ\h"3J\trHt"3rHhrHt"3rHh*h"3*t*h"3:h:t"3:hvh"3vtvh"3~@VT"3VT7VT"3VT7r7"3rr7"3r"7"77"7"3"37"37R7"3RR7"37"3787"3887"3788"3787"37"37RR"37R7"37"3"7"77"7"3r"37rr"37r7VT"3VT7VT"3hvtv"3hvh:"3t:h:"3h*t*"3h*hrH"3trHhrH"3trHtJ\"hJ\tJ\"hJ\hz"tzhz"3tzt"3ht"3hh"3th"8t"ttv"3tt"3tvt"38vB"3VT~@*95*9)6"3t:t"ht"hh"th"3tt*"3tRt*"h*t*"h*h"th"3tt"3tt"ht"h*h"*t*h"3*tRt"3*tt"ht"hh"th"3t:t"3"7"77*"*7*"3*R"3R*"*7*"*77"7"3"3:"7"77"7"3*"3*"7"77"7"3:*X7* s)8*X)9* sp10*Xp11* s8c12*X8c13* s14*X15* sȜ16*XȜ17* s918*X919* sX20*X s21*XX22*9 s23*9X24*Ȝ s25*ȜX26* s27*X28*8c s29*8cX30*p s31*pX32*) s33*X34*)X35*936*)937*Ȝ38*)Ȝ39*40*)41*8c42*)8c43*)p45*p44*)46*)47*))48*p49*p)50*8c51*8c)521Ȝ"(>VALUE1A"(>NAMErtwn"PSPSLPS"LPS!"!"PS"PSPSPS"(RZJ"`fP("``"`(fP"3fP(>d("3>d`>d("3>d``"3(`"3*`*("3*`rH`"3rH(rH`"3rH(J\("J\`J\("J\`z`"z(z`"3z(("3`("3``"3(`"3(("`("`F`"F(F`"3F(("3`("3``"3(`"3("(""`"(""`~@`"~@(~@`"+J"++"+J"3JJ›"3+›J›"3+›+}"3J}+}"3+RJR"3+R+"3J+"3JJ"+J"++"J+"3JJr"3+rJr"3+r+VT"3JVT+VT"3JVTJ~@"+~@J~@"+~@+""J"+""3J"J"3+J"3++"3J+"3JJF"+FJF"+F+"J+"3(fP(>d"3`>d(>d"3`>d`"3`*(*"3`*`rH"3(rH`rH"3(rH(J\"`J\(J\"`J\`z"(z`z"3(z("3`("3``"3(`"3(("`("``F"(F`F"3(F("3`("3``"3(`"3((""`"(""`"`~@"(~@`~@"3J›J"3›+›J"3›+}+"3}J}+"3R+RJ"3R++"3J+"3JJ"+J"++"J+"3JrJ"3r+rJ"3r+VT+"3VTJVT+"3VTJ~@J"~@+~@J"~@+"+""J"+"3"JJ"3+J"3++"3J+"3JFJ"F+FJ"F++"J+*1*2*Ȝ3*Ȝ4" " > ">2> "2> "3JJ"3+J"3++"3J+"3JzJ"z+zJ"z+J\+"J\JJ\+"3J\JrHJ"3rH+rHJ"3rH+*+"3*J*+"3+J"3+>d+"3>dJ>d+"3~@(VT("3VT`VT("3VT`r`"3r(r`"3r(("`("``"(`"3(("3`("3`R`"3R(R`"3}`}("3}`›`"3›(›`"3`›(›"3`›`}"3`R(R"3`R`"3(`"3(("`("``"(`"3((r"3`r(r"3`r`VT"3(VT`VT"3+>dJ>d"3+>d+"3+*J*"3+*+rH"3JrH+rH"3JrHJJ\"+J\JJ\"+J\+z"Jz+z"3JzJ"3+J"3++"3J+"›(J("J(J>d"3JJ"3RZJ>dJ"3(›("3(VT(~@*95*96"+J"++"J+"3JJ*"3JRJ*"+*J*"+*+"J+"+J"+*+"*J*+"3*JRJ"3*JJ"+J"++"J+"`("``*"(*`*"3(*(R"3R(*("*`*("*``"(`"`("``"(`"3(*("3(*("`("``"(`"3+J"3++8"3J8+8"3J8JbL"+bLJbL"+bL+&j"J&j+&j"3J}J&j"3JJ"3JJ"3+J"3+8+"38J8+"&j+&jJ"&j+bL+"bLJbL+"38JbLJ"3}J&jJ"3:+:J"3:+v+"3vJv+"3vJJ"+J"+ڕ+"ڕJڕ+"3ڕJJ"3J:J"3JJ:"3+:J:"3+:+v"3Jv+v"3J+"3JJڕ"+ڕJڕ"+ڕ+"J+"3JvJ"3}(&j("&j`&j("3`("3`8`"38(8`"38(bL("bL`bL("bL`&j`"3(("3(:("3:`:("3:`v`"3v(v`"3(ڕ("ڕ`ڕ("ڕ``"(`"3v(("3`:(:"3`:`v"3(v`v"3(v("`("``ڕ"(ڕ`ڕ"3(ڕ("3`("3((:"3(("3`("3``8"3(8`8"3(}`}"3(}(&j"`&j(&j"`&j`bL"(bL`bL"3(8(bL%%&%&&%&%,kԔrFrF%ԔԔrFrF%,k,krFrF%Ԕ,krFrF*X7*X8* s9*10* s11*)12* s)13*p14* sp15*8c16* s8c17*18* s19*Ȝ20* sȜ21*922* s923*X24* sX25* s26* s27* s s28*X29*X s30*931*9 s32*Ȝ33*Ȝ s34*35* s36*8c37*8c s38*p39*p s40*)41*) s42*43* s44* s45*X46*X47*948*949*Ȝ50*Ȝ51*52*53*8c54*8c55*p56*p57*)58*)59*60*61*62*)63*)64*p65*p66*8c67*8c681Ȝ(g"(>VALUE1L(g"(>NAME))#"{"{xI"xIxIxI"xIxIxI"xI"~:"ؘ(q.~"ؘ(q(qؘ"(qؘ~."3.~~"3(q~"3(q(q"3~(q"3*(q*~"3*(qrH(q"3rH~rH(q"3rH~J\~"J\(qJ\~"J\(qz(q"z~z(q"3z~~"3(q~"3(q(q"3~(q"3~~"(q~"(qF(q"F~F(q"3F~~"3(q~"3(q(q"3~(q"3~"~""(q"~""(q~@(q"~@~~@(q"؎(g:"؎(g(g؎"(g؎:"3::"3؎:"3؎؎6"3:6؎6"3؎R:R"3؎R؎"3:؎"3::"؎:"؎؎":؎"3::r"3؎r:r"3؎r؎VT"3:VT؎VT"3:VT:~@"؎~@:~@"؎~@؎"":"؎""3:":"3؎:"3؎؎"3:؎"3::F"؎F:F"؎F؎":؎"3~.~"3(q~"3(q(q"3~(q"3(q*~*"3(q*(qrH"3~rH(qrH"3~rH~J\"(qJ\~J\"(qJ\(qz"~z(qz"3~z~"3(q~"3(q(q"3~(q"3~~"(q~"(q(qF"~F(qF"3~F~"3(q~"3(q(q"3~(q"3~~""(q"~""(q"(q~@"~~@(q~@"3::"3؎:"3؎6؎"36:6؎"3R؎R:"3R؎؎"3:؎"3::"؎:"؎؎":؎"3:r:"3r؎r:"3r؎VT؎"3VT:VT؎"3VT:~@:"~@؎~@:"~@؎"؎"":"؎"3"::"3؎:"3؎؎"3:؎"3:F:"F؎F:"F؎؎":؎" " > ">2> "2> "3::"3؎:"3؎؎"3:؎"3:z:"z؎z:"z؎J\؎"J\:J\؎"3J\:rH:"3rH؎rH:"3rH؎*؎"3*:*؎"3؎:"3؎؎"3:؎"3~@~VT~"3VT(qVT~"3VT(qr(q"3r~r(q"3r~~"(q~"(q(q"~(q"3~~"3(q~"3(qR(q"3R~R(q"36(q6~"36(q(q"3~(q"3(q~"3(q(q6"3~6(q6"3(qR~R"3(qR(q"3~(q"3~~"(q~"(q(q"~(q"3~~r"3(qr~r"3(qr(qVT"3~VT(qVT"3؎:"3؎؎"3:؎"3؎*:*"3؎*؎rH"3:rH؎rH"3:rH:J\"؎J\:J\"؎J\؎z":z؎z"3:z:"3؎:"3؎؎"3:؎"~:~":~:"3::"3::"3~~"3~VT~~@"؎:"؎؎":؎"3::*"3:R:*"؎*:*"؎*؎":؎"؎:"؎*؎"*:*؎"3*:R:"3*::"؎:"؎؎":؎"(q~"(q(q*"~*(q*"3~*~R"3R~*~"*(q*~"*(q(q"~(q"(q~"(q(q"~(q"3~*~"3~*~"(q~"(q(q"~(q"3:6:^"؎^:^"؎^؎":؎"3؎:"3؎؎8"3:8؎8"3:8:bL"؎bL:bL"؎bL؎&j":&j؎&j"3:&j:}"3؎}:}"3؎}؎›"3:›؎›"3::›"3::"3::"3؎:"3؎8؎"38:8؎"^؎^:"^؎؎":؎"3:›:"3›؎›:"3›؎}؎"3}:}؎"3}:&j:"&j؎&j:"&j؎bL؎"bL:bL؎"38:bL:"36:^:"3:2:"2؎2:"2؎fP؎"fP:fP؎"3:؎::"3:؎v؎"3v:v؎"3v::"؎:"؎ڕ؎"ڕ:ڕ؎"3ڕ::"3؎:"3؎>d؎"3>d:>d؎"3fP:>d:"3:::"3:::"3؎:::"3؎:؎v"3:v؎v"؎2:2"؎2؎fP":fP؎fP"3:fP:>d"3؎>d:>d"3؎>d؎"3:؎"3::ڕ"؎ڕ:ڕ"؎ڕ؎":؎"3:v:"3::2"36~^~"^(q^~"^(q(q"~(q"3(q~"3(q8(q"38~8(q"38~bL~"bL(qbL~"bL(q&j(q"&j~&j(q"3&j~}~"3}(q}~"3}(q›(q"3›~›(q"3~›~"3~~"3~:~"3:(q:~"3:(qv(q"3v~v(q"2(q2~"2(qfP(q"fP~fP(q"3fP~>d~"3>d(q>d~"3>d(q(q"3~(q"3~ڕ~"ڕ(qڕ~"ڕ(q(q"~(q"3v~~"3~2~"3~~2"(q2~2"(q2(qfP"~fP(qfP"3(q:~:"3(q:(qv"3~v(qv"3~v~"(q~"(q(qڕ"~ڕ(qڕ"3~ڕ~"3(q~"3(q(q>d"3~>d(q>d"3~fP~>d"3~~:"3~~"3(q~"3(q(q8"3~8(q8"(q^~^"(q^(q"~(q"3~~›"3(q›~›"3(q›(q}"3~}(q}"3~}~&j"(q&j~&j"(q&j(qbL"~bL(qbL"3~8~bL"3~6~^%%&%&&%&%,kԔrFrF%ԔԔrFrF%,k,krFrF%Ԕ,krFrF*PS1*2*ȜPS3*Ȝ4*9PS5*96*XPS7*X8* sPS9* s10*PS11*12*13*14*15*)16*)17*p18*p19*8c20*8c21*22*23*Ȝ24*Ȝ25*926*927*X28*X29* s30*32* s31*33*34* s36* s35*X38*X37*940*939*Ȝ41*Ȝ42*43*44*8c45*8c46*p47*p48*)50*)49*52*51*53*76*PS74*73*PS72*)71*PS)70*p69*PSp68*8c67*PS8c66*65*PS64*Ȝ63*PSȜ62*961*PS960*X59*PSX58* s57*55*PS s56*PS54*p82*pPS81*)80*)PS79*78*PS77*PS75*8cPS83*8c8419j"(>VALUE1{j"(>NAMES|DIL10*9,k1*Ȝ,k2*8cԔ7*Ԕ81(>NAME*,k3*8c,k4*pԔ6*p,k51>2(>VALUE*ȜԔ9*9Ԕ10" rr" " r "r'"P"'P| |*X,k1*),k7*)Ԕ81Ɵ(>NAME12(>VALUE*XԔ14"NVrr"NV"NVrNV"r'"P"'P||*X,k1*9,k2*),k7*)Ԕ81К(>NAME*p,k61D2(>VALUE*pԔ9*9Ԕ13*XԔ14"D[rr"D["D[rD["r'"P"'P|8\8DIL48*X1*4X2*lQX3*X4*X5*{X6*LX7*AX8*X9*X10*,kX11*dX12*1X13*ԔX14* X15*D[X16*|X17*!X18*X19*$X20*\KX21*X22*X23*uX24*u)25*)26*)27*\K)28*$)29*)30*!)31*|)32*D[)33* )34*Ԕ)35*1)36*d)37*,k)38*)39*)40*A)41*L)42*{)43*)44*)45*lQ)46*4)47*)48".rҍ"ҍҍ"ҍ.r1Lc"(>NAME1vP"(>VALUE".r.r"".r.rZ".r".rZ|$l|\T*{,k1*L,k2*d,k7*1,k81?(>NAME*A,k3*,k4*,k,k6*,k512(>VALUE*Ԕ,k9* ,k10*D[,k11*|,k12*!,k13*,k14*Ԕ15*!Ԕ16*|Ԕ17*D[Ԕ18* Ԕ19*ԔԔ20*1Ԕ21*dԔ22*,kԔ23*Ԕ24"0rxIr"0xI"0r"0xIrxI'"0xIxIP"0xI'xIP|*Ԕ25*AԔ26*LԔ27*{Ԕ28)|~DIL22S*,k1* s,k2*8c,k7*p,k81`(>NAME*X,k3*9,k4*,k6*Ȝ,k51 }((>VALUE*),k9*,k10*,k11*Ԕ12*Ԕ13*)Ԕ14*pԔ15*8cԔ16*Ԕ17*ȜԔ18*9Ԕ19*XԔ20* sԔ21*Ԕ22"0!rLr"0L!"0!r!"0LrL'"0LLP"0L'LP|O))PGA68L* sA02*9A04*ȜA05*A06*8cA07*pA08*)A09*A10*B11*)C11*pD11*8cE11*F11*ȜG11*9H11*XJ11* sK11*L10*)L09*pL08*8cL07*L06*ȜL05*9L04*XL03* sL02* sK01*XJ01*9H01*ȜG01*F01*8cE01*pD01*)C01*B01*XB03*9B04*ȜB05*B06*8cB07*pB08*)B09*B10*)C10*pD10*8cE10*F10*ȜG10*9H10*XJ10* sK10*) sK09*p sK08*8c sK07* sK06*Ȝ sK05*9 sK04*X sK03* s sK02* sXJ02* s9H02* sȜG02* sF02* s8cE02* spD02* s)C02* sB02"(:::":::~":~~~"~~~J"~J(:1,k8c"(>NAME1"(>VALUE*XA03"D[D[D["D[D[D["D["D[::*PSA01*PSA02* sPSA03*XPSA04*9PSA05*ȜPSA06*PSA07*8cPSA08*pPSA09*)PSA10*PSA11*PSA12*PSPSA13*PSB13*M01* sL01*XK01*9J01*ȜH01*G01*8cF01*pE01*)D01*B01*B02* sB03*XB04*9B05*ȜB06*B07*8cB08*pB09*)B10*B11*B12*PS)D13*PSpE13*PS8cF13*PSG13*PSȜH13*PS9J13*PSXK13*PS sL13*PSM13*M02* sL02*XK02*9J02*ȜH02*G02*8cF02*pE02*)D02""Fb"FbFbFb"FbFbFbl"Fbl*N02*PSN13*N12*N11*)N10*pN09*8cN08*N07*ȜN06*9N05*XN04* sN03*PSC13*C01*C12*C11*)C10*pC09*8cC08*C07*ȜC06*9C05*XC04* sC03*C02*N01* sM03* s sL03* sXK03* s9J03* sȜH03* sG03* s8cF03* spE03* s)D03*M12* sL12*XK12*9J12*ȜH12*G12*8cF12*pE12*)D12*XM04*9M05*ȜM06*M07*8cM08*pM09*)M10*M11* sL11*) sL10*p sL09*8c sL08* sL07*Ȝ sL06*9 sL05*X sL04*G11*XK11*9J11*ȜH11*8cF11*pE11*)D11*))D10*)XK10*XXK04*X)D04*)9J10*)pE10*XpE04*X9J04*9XK05*pXK09*p)D09*9)D051,kjJ"(>NAME19"(>VALUE",k Ԕ"Ԕ" "  " ,k ::3*PSA01*PSA02* sPSA03*XPSA04*9PSA05*ȜPSA06*PSA07*8cPSA08*pPSA09*)PSA10*PSA11*PSA12*PSPSA13*PSB13*M01* sL01*XK01*9J01*ȜH01*G01*8cF01*pE01*)D01*B01*B02* sB03*XB04*9B05*ȜB06*B07*8cB08*pB09*)B10*B11*B12*PS)D13*PSpE13*PS8cF13*PSG13*PSȜH13*PS9J13*PSXK13*PS sL13*PSM13*M02* sL02*XK02*9J02*ȜH02*G02*8cF02*pE02*)D02"0"0Fb"0FbFbFb"0FbFbFbl"0Fbl*N02*PSN13*N12*N11*)N10*pN09*8cN08*N07*ȜN06*9N05*XN04* sN03*PSC13*C01*C12*C11*)C10*pC09*8cC08*C07*ȜC06*9C05*XC04* sC03*C02*N01* sM03* s sL03* sXK03* s9J03* sȜH03* sG03* s8cF03* spE03* s)D03*M12* sL12*XK12*9J12*ȜH12*G12*8cF12*pE12*)D12*XM04*9M05*ȜM06*M07*8cM08*pM09*)M10*M11* sL11* sL07*G111"(>NAME1Xd"(>VALUE"0 "0D[ "0D[D[D["0D[D[D["0D[*X sL04*9 sL05*Ȝ sL06*8c sL08*p sL09*) sL10%PS11PGA168*@A01*xIA02*A03*A04* sA05*XA06*9A07*ȜA08*A09*8cA10*pA11*)A12*A13*B13*xIP02*@XM01*@9L01*@ȜK01*@J01*@8cH01*@pG01*@)F01*@E01*@D01*@B01*xIB02*B03*B04* sB05*XB06*9B07*ȜB08*B09*8cB10*pB11*)B12*P03*xIXM02*xI9L02*xIȜK02*xIJ02*xI8cH02*xIpG02*xI)F02*xIE02*xID02"r*d*d*d"*d*d*d֛"*d֛֛֛"֛֛֛2"֛2r*d*A14*B14*PSC14*xI sN02* sN03*PSC13*@PSC01*)PSC12*pPSC11*8cPSC10*PSC09*ȜPSC08*9PSC07*XPSC06* sPSC05*PSC04*PSC03*xIPSC02*@ sN01*@P01*XM03*9L03*ȜK03*J03*8cH03*pG03*)F03*E03*D031 1"(>NAME1X"(>VALUE*@Q01*@xIR01*@@S01*PSA15*A16*A17*Q14*xIQ02*Q13*)Q12*pQ11*8cQ10*Q09*ȜQ08*XQ06* sQ05*Q04*Q03*9Q07*xIR14*xIxIR02*xIR13*)xIR12*pxIR11*8cxIR10*xIR09*ȜxIR08*XxIR06* sxIR05*xIR04*xIR03*9xIR07*@S14*xI@S02*@S13*)@S12*p@S11*8c@S10*@S09*Ȝ@S08*X@S06* s@S05*@S04*@S03*9@S07*PSB15*PSP15*PSPSC15*PSD15*PSE15*PS)F15*PSpG15*PS8cH15*PSȜK15*PS9L15*PSXM15*PS sN15*PSJ15*B16*P16*PSC16*D16*E16*)F16*pG16*8cH16*ȜK16*9L16*XM16* sN16*J16*P17*B17* sN17*XM17*9L17*ȜK17*J17*8cH17*)F17*E17*D17*PSC17*pG17*PSQ15*Q16*Q17*PSxIR15*xIR16*xIR17*PS@S15*@S16*@S17"LL!L"!L!!"L!!!"L!LL }DIL02*,k1*Ԕ2"2ȜȜ"8c28c"28c21"211"18c"Ȝd"d2d"d1"2d2Ȝ1ZȜ(>NAME18cȜ(>VALUEO))91* s 68*9 64*Ȝ 62* 60*8c 58*p 56*) 54* 52* 51*) 49*p 47*8c 45* 43*Ȝ 41*9 39*X 37* s 35* 34*) 32*p 30*8c 28* 26*Ȝ 24*9 22*X 20* s 18* s 17*X 15*9 13*Ȝ 11* 9*8c 7*p 5*) 3* 1*X 67*9 65*Ȝ 63* 61*8c 59*p 57*) 55* 53*) 50*p 48*8c 46* 44*Ȝ 42*9 40*X 38* s 36*) s 33*p s 31*8c s 29* s 27*Ȝ s 25*9 s 23*X s 21* s s 19* sX 16* s9 14* sȜ 12* s 10* s8c 8* sp 6* s) 4* s 2"(:::":::~":~~~"~~~J"~J(:*X 661,k1"(>NAME1"(>VALUE"D[D[D["D["D["D[D[D[::XO*PSA01*PSA02* sPSA03*XPSA04*9PSA05*ȜPSA06*PSA07*8cPSA08*pPSA09*)PSA10*PSA11*PSA12*PSPSA13*PSB13*M01* sL01*XK01*9J01*ȜH01*G01*8cF01*pE01*)D01*B01*B02* sB03*XB04*9B05*ȜB06*B07*8cB08*pB09*)B10*B11*B12*PS)D13*PSpE13*PS8cF13*PSG13*PSȜH13*PS9J13*PSXK13*PS sL13*PSM13*M02* sL02*XK02*9J02*ȜH02*G02*8cF02*pE02*)D02"3"3Fb"3FbFbFb"3FbFbFbl"3Fbl*N02*PSN13*N12*N11*)N10*pN09*8cN08*N07*ȜN06*9N05*XN04* sN03*PSC13*C01*C12*C11*)C10*pC09*8cC08*C07*ȜC06*9C05*XC04* sC03*C02*N01* sM03* s sL03* sXK03* s9J03* sȜH03* sG03* s8cF03* spE03* s)D03*M12* sL12*XK12*9J12*ȜH12*G12*8cF12*pE12*)D12*XM04*9M05*ȜM06*M07*8cM08*pM09*)M10*M11* sL11*) sL10*p sL09*8c sL08* sL07*Ȝ sL06*9 sL05*X sL04*G11*XK11*9J11*ȜH11*8cF11*pE11*)D11*))D10*)XK10*XXK04*X)D04*ȜXK06*XpE04*Ȝ)D06*)pE10"3d)p)"3p)pԔ"3pԔD[Ԕ"3D[ԔD["3D["31"3Ԕ1"3ԔdԔ"3dԔd)1"(>NAME1,k"(>VALUElltPGA132*{A01*LA02*AA03*A04*A05*,kA06*dA07*1A08*ԔA09* A10*D[A11*|A12*!A13*!!B13*D[D14* E14*ԔF14*1G14*dH14*,kJ14*K14*L14*AM14*{P14*L{P02*{AM01*{L01*{K01*{,kJ01*{dH01*{1G01*{ԔF01*{ E01*{D[D01*{!B01*L!B02*A!B03*!B04*!B05*,k!B06*d!B07*1!B08*Ԕ!B09* !B10*D[!B11*|!B12*!D[D13*! E13*!ԔF13*!1G13*!dH13*!,kJ13*!K13*!L13*!AM13*!{P13*|{P12*D[{P11* {P10*Ԕ{P09*1{P08*d{P07*,k{P06*{P05*{P04*A{P03*LAM02*LL02*LK02*L,kJ02*LdH02*L1G02*LԔF02*L E02*LD[D02"FbVVV"VVV0"V000"000"0FbV*A14*!B14*|C14*LN14*LLN02*!LN13*|LN12*D[LN11* LN10*ԔLN09*1LN08*dLN07*,kLN06*LN05*LN04*ALN03*!|C13*{|C01*||C12*D[|C11* |C10*Ԕ|C09*1|C08*d|C07*,k|C06*|C05*|C04*A|C03*L|C02*{LN01*{{P01*AAM03*AL03*AK03*A,kJ03*AdH03*A1G03*AԔF03*A E03*AD[D03*|AM12*|L12*|K12*|,kJ12*|dH12*|1G12*|ԔF12*| E12*|D[D12*AM04*AM05*,kAM06*dAM07*1AM08*ԔAM09* AM10*D[AM111,k1"(>NAME1"(>VALUE" s" s s s" s " s s s"22*\KA01*\KA02*{\KA03*L\KA04*A\KA05*\KA06*\KA07*,k\KA08*d\KA09*1\KA10*Ԕ\KA11* \KA12*D[\KA13*D[$B13*M01*,kL01*dK01*1J01*ԔH01* G01*D[F01*|E01*!D01*$B01*$B02*{$B03*L$B04*A$B05*$B06*$B07*,k$B08*d$B09*1$B10*Ԕ$B11* $B12*D[{R13*D[S13*M02*,kL02*dK02*1J02*ԔH02* G02*D[F02*|E02*!D02"֛|||"|||"|"*d"*d֛|*N02*D[T13* T12*ԔT11*1T10*dT09*,kT08*T07*T06*AT05*LT04*{N03*D[C13*C01* C12*ԔC11*1C10*dC09*,kC08*C07*C06*AC05*LC04*{C03*C02*N01*{M03*{,kL03*{dK03*{1J03*{ԔH03*{ G03*{D[F03*{|E03*{!D03* S12* {R12*LS04*AS05*S06*S07*,kS08*dS09*1S10*ԔS11*Ԕ{R11*1{R10*d{R09*,k{R08*{R07*{R06*A{R05*L{R041X^R"(>VALUE1,k8c"(>NAME*AP01*LQ01*{R01*S01*|\KA14*!\KA15*\KA16*$\KA17*AP02*{AP03*LQ02*{LQ03*{{R03*{S03*{T03*T02*S02*{R02*|$B14*|C14*!$B15*!C15*$B16*C16*$$B17*$C17*\K$B18*\KC18*!D16*$!D17*\K!D18*|E16*$|E17*\K|E18*D[F16*$D[F17*\KD[F18* G16*ԔH16*1J16*dK16*,kL16*M16*N16*AP16*LQ16*{R16*S16*T16*$T17*\KT18*$S17*${R17*$LQ17*$AP17*$N17*$M17*$,kL17*$dK17*$1J17*$ԔH17*$ G17*\K G18*\KԔH18*\K1J18*\KdK18*\K,kL18*\KM18*\KN18*\KAP18*\KLQ18*\K{R18*\KS18*|{R14*!{R15*!S15*!T15*|T14*|S14"PS"PSPSPS"APSPSPS"APS|"|*T01*\K\KA18$J*{91*L92*d97*1981:J\" >NAME*A93*94*,k96*951P" >VALUE*Ԕ99* 910*D[911*|912*!913*914*p15*!p16*|p17*D[p18* p19*Ԕp20*1p21*dp22*,kp23*p24*p25*Ap26*Lp27*{p28"xI"xIJ\J\"J\"xIxI'"xIJ\xIP"xI'xIP|)SDIL22*91* s92*8c97*p981`J\ >NAME*X93*994*96*Ȝ951К( >VALUE*)99*910*p13*)p14*pp15*8cp16*p17*Ȝp18*9p19*Xp20* sp21*p22"!L"LJ\!J\"!!J\"LL'"LJ\LP"L'LP|*p12*911J|*Ȝ,k1*,k2*Ԕ5*ȜԔ6*8c,k3*8cԔ4"Ԕp,kp",k9Ԕ9"ԔpԔ8c",kp,k8c",k9,kȜ",k',kP|1((>VALUE1J\Ȝ(>NAME",k8cԔ8c",k8c,k'"Ԕ8cԔȜ",kȜԔȜ",kȜ,kP"ԔȜԔ9||*,k,k1*d,k2*ԔԔ5*1Ԕ6*1,k3*Ԕ,k4"0pp9p"099p9"0ppp8c"09p98c"0999Ȝ"09'9P|1((>VALUE1*җ(>NAME*dԔ7*,kԔ8"098cp8c"098c9'"0p8cpȜ"09ȜpȜ"09Ȝ9P"0pȜp9|C9*X,k1*9,k2*8c,k5*p,k6*Ȝ,k3*,k4"D[pp"9D[9"D[pD[8c"p8c"9Ȝ"'P|1 2(>VALUE1К6f(>NAME*),k7*)Ԕ8*pԔ9*8cԔ10*Ԕ11*ȜԔ12*9Ԕ13*XԔ14"8cD[8c"8c'"D[8cD[Ȝ"ȜD[Ȝ"ȜP"D[ȜD[9B|h^*,k1*,k2*1,k5*Ԕ,k6*,k,k3*d,k4"p sp" s99"p8c" sp s8c" s9 sȜ" s' sP|12(>VALUE14i>(>NAME* ,k7*D[,k8*D[Ԕ9* Ԕ10*ԔԔ11*1Ԕ12*dԔ13*,kԔ14*Ԕ15*Ԕ16" s8c8c" s8c s'"8cȜ" sȜȜ" sȜ sP"Ȝ9 t|* s,k1*X,k2*,k5*8c,k6*9,k3*Ȝ,k4"|pAp"A9|9"|p|8c"ApA8c"A9AȜ"A'AP|12(>VALUE17>(>NAME*p,k7*),k8*,k9*Ԕ10*)Ԕ11*pԔ12*8cԔ13*Ԕ14*ȜԔ15*9Ԕ16*XԔ17* sԔ18"A8c|8c"A8cA'"|8c|Ȝ"AȜ|Ȝ"AȜAP"|Ȝ|9"[|*A,k1*,k2*d,k5*1,k6*,k3*,k,k4"pp"99"p8c"p8c"9Ȝ"'P|12>VALUE1>>NAME*Ԕ,k7* ,k8*D[,k9*|,k10*|Ԕ11*D[Ԕ12* Ԕ13*ԔԔ14*1Ԕ15*dԔ16*,kԔ17*Ԕ18*Ԕ19*AԔ20"8c8c"8c'"8cȜ"ȜȜ"ȜP"Ȝ9$)S*91* s92*Ȝ95*96*X93*994"0! L "L!"! !Ԕ"L LԔ"LL,k"L'LP|1К((>VALUE1`(>NAME*8c97*p98*)99*910*911*p12*p13*)p14*pp15*8cp16*p17*Ȝp18*9p19*Xp20* sp21*p22"LԔ!Ԕ"LԔL'"!Ԕ!,k"L,k!,k"L,kLP"!,k!&S*L91*A92*,k95*d96*93*94"PS "PS"PS PSԔ"PSԔPS,k"PS,kPS" Ԕ"Ԕ'",k",kP"'P|1((>VALUE1Ģ(>NAME*197*Ԕ98* 99*D[910*|911*!912*!p13*|p14*D[p15* p16*Ԕp17*1p18*dp19*,kp20*p21*p22*Ap23*Lp24",kPS,k"PSԔԔ&%*LX1*AX2*,kX5*dX6*X3*X4"0PSD[D["PS"PSD[PS "PS PS"PSPS"D[ " '""P"'P|1 }((>VALUE1Ν0(>NAME*1X7*ԔX8* X9*D[X10*|X11*!X12*!)13*|)14*D[)15* )16*Ԕ)17*1)18*d)19*,k)20*)21*)22*A)23*L)24"PS "PS*lL@*{X1*LX2*X5*,kX6*AX3*X4"D[xID["xI"D[ "xID[xI "xIxI"xI'xIP|1((>VALUE1?(>NAME*dX7*1X8*ԔX9* X10*D[X11*|X12*!X13*X14*)15*!)16*|)17*D[)18* )19*Ԕ)20*1)21*d)22*,k)23*)24*)25*A)26*L)27*{)28"xI  "xI xI'" "xI"xIxIP".1qg*X1*{X2*X5*X6*LX3*AX4"D[@D["@"D[ "@D[@ "@@"@'@P|1К2(>VALUE1T(>NAME*,kX7*dX8*1X9*ԔX10* X11*D[X12*|X13*!X14*X15*$X16*$)17*)18*!)19*|)20*D[)21* )22*Ԕ)23*1)24*d)25*,k)26*)27*)28*A)29*L)30*{)31*)32"@  "@ @'" "@"@@P"22*X1*X2*AX5*X6*{X3*LX4"|D[D["|"|D[| "D[ ""'P|1N2(>VALUE1&tb(>NAME*X7*,kX8*dX9*1X10*ԔX11* X12*D[X13*|X14*!X15*X16*$X17*\KX18*\K)19*$)20*)21*!)22*|)23*D[)24* )25*Ԕ)26*1)27*d)28*,k)29*)30*)31*A)32*L)33*{)34*)35*)36" | " '"| |"|"P"||6k*lQX1*X2*LX5*AX6*X3*{X4"0D[D["0"0D[0 "D[ ""'P|12(>VALUE1 (>NAME*X7*X8*,kX9*dX10*1X11*ԔX12* X13*D[X14*|X15*!X16*X17*$X18*\KX19*X20*)21*\K)22*$)23*)24*!)25*|)26*D[)27* )28*Ԕ)29*1)30*d)31*,k)32*)33*)34*A)35*L)36*{)37*)38*)39*lQ)40" 0 " '"0 0"0"P"00,2DIL36*X1*X2*X7*,kX810o"(>NAME*{X3*LX4*X6*AX51?F"(>VALUE*dX9*1X10*ԔX11* X12*D[X13*|X14*!X15*X16*$X17*\KX18*\K)19*$)20*)21*!)22*|)23*D[)24* )25*Ԕ)26*1)27*d)28*,k)29*)30*)31*A)32"|"|"||"'"P"'P|*L)33*{)34*)35*)36,S2*91*92*97*,k981"(>NAME*{93*L94*96*A951Ȝ"(>VALUE*d99*1910*Ԕ911* 912*D[913*|914*!915*916*$917*\K918*\Kp19*$p20*p21*!p22*|p23*D[p24* p25*Ԕp26*1p27*dp28*,kp29*p30*p31*Ap32"|"J\|J\"||J\"'"J\P"'P|*Lp33*{p34*p35*p36+l|+*{,k1*L,k2*d,k7*1,k81?(>NAME*A,k3*,k4*,k,k6*,k512(>VALUE*Ԕ,k9* ,k10*D[,k11*|,k12*!,k13*,k14*Ԕ15*!Ԕ16*|Ԕ17*D[Ԕ18* Ԕ19*ԔԔ20*1Ԕ21*dԔ22*,kԔ23*Ԕ24"rxIr"xI"r8c"8c"xIrxI'"xIxIP"xI'xIP|*Ԕ25*AԔ26*LԔ27*{Ԕ28"1pxIp"xIpxI8c"p8c"1xI99"9Ȝ"xI9xIȜ$)|WL*,k1* s,k2*8c,k7*p,k81`(>NAME*X,k3*9,k4*,k6*Ȝ,k51 }((>VALUE*),k9*,k10*,k11*Ԕ12*Ԕ13*)Ԕ14*pԔ15*8cԔ16*Ԕ17*ȜԔ18*9Ԕ19*XԔ20* sԔ21*Ԕ22"0!rLr"0L!"0!r!"0LrL'"0LLP"0L'LP|"!pLp" !p!8c" LpL8c"L9!9" L9LȜ" !9!Ȝ&|x*L,k1*A,k2*1,k7*Ԕ,k81Ģ(>NAME*,k3*,k4*d,k6*,k,k51<(>VALUE* ,k9*D[,k10*|,k11*!,k12*!Ԕ13*|Ԕ14*D[Ԕ15* Ԕ16*ԔԔ17*1Ԕ18*dԔ19*,kԔ20*Ԕ21*Ԕ22*AԔ23*LԔ24"0PSrr"0PS"0PSrPS"0r'"0P"0'P|"0PSpp"PSpPS8c"p8c"09PS9"9Ȝ"PS9PSȜ *LX1*AX2*X3*X4*,kX5*dX6*1X7*ԔX8* X9*D[X10*|X11*!X12*!)13*|)14*D[)15* )16*Ԕ)17*1)18*d)19*,k)20*)21*)22*A)23*L)241Ν"(>NAME"d1(F"(>VALUE"1d|"ZNZN"1"ZN"ZN$l*{X1*LX2*AX3*X4*X5*,kX6*dX7*1X8*ԔX9* X10*D[X11*|X12*!X13*X14*)15*!)16*|)17*D[)18* )19*Ԕ)20*1)21*d)22*,k)23*)24*)25*A)26*L)27*{)281xI"(>NAME"nNdnN1~J"(>VALUE"nN1nNd|""nNnN1"nN"nN |*L,k1*A,k2*,k3*,k4*,k,k5*d,k6*1,k7*Ԕ,k8* ,k9*D[,k10*|,k11*!,k12*!Ԕ13*|Ԕ14*D[Ԕ15* Ԕ16*ԔԔ17*1Ԕ18*dԔ19*,kԔ20*Ԕ21*Ԕ22*AԔ23*LԔ241җ"(>NAME"2ܒ1$F">VALUE"2|"dIܒdI$m"ܒdIܒ"$mdI$m"$m)|3+*,k1* s,k2*X,k3*9,k4*Ȝ,k5*,k6*8c,k7*p,k8*),k9*,k10*,k11*Ԕ12*Ԕ13*)Ԕ14*pԔ15*8cԔ16*Ԕ17*ȜԔ18*9Ԕ19*XԔ20* sԔ21*Ԕ221җ"(>NAME"~2~ܒ1RZF"(>VALUE"~~2|":ܒ:$m"~ܒ:ܒ"~$m~"~$m:$m)S`X*91* s92*X93*994*Ȝ95*96*8c97*p98*)99*910*911*p12*p13*)p14*pp15*8cp16*p17*Ȝp18*9p19*Xp20* sp21*p221x6f"(>NAME"0`2`@a1*nL"(>VALUE"0``2|"0+@a+"0`@a+@a"0``"0`+ S}*L91*A92*93*94*,k95*d96*197*Ԕ98* 99*D[910*|911*!912*!p13*|p14*D[p15* p16*Ԕp17*1p18*dp19*,kp20*p21*p22*Ap23*Lp241М,k"(>NAME"2@a1B"(>VALUE"2|"FX@aFX"@aFX@a""FX [*LA1*AA2*A3*A4*,kA5*dA6*1A7*ԔA8* A9*D[A10*|A11*!A12*!|13*||14*D[|15* |16*Ԕ|17*1|18*d|19*,k|20*|21*|22*A|23*L|241{ }"(>NAME"d4i1A2"(>VALUE"1d|" v4i v̖"̖1"̖ v̖"4i v4iX!ZIP24*~d1*12*(d3*RZ14*d5*16*&d7* 18*^Rd9*110*d11*2112*d13*jJ114*|d15*116*>d17*118*vBd19*t120*d21*J122*d23*:1241u(>NAME1LY(>VALUE"6Ν"ΝΝ2"3Ν2n"2b22b"32bnD6"32bL"32b2L2"3LnL2%3~< "3LL6"3L2L"3nD66"336 6" 6\6"nDn2b2"nDn+n"nn"3nn"3\66"6$m6"nn"3nLYn"LYn;n"3$m6'6"'6 6"3;nn"nPn"3 6x6"x66"@a6|C6"3Pnܒn"36@a6"ܒnun"3un/n"3|C66"6D6"К6 }6"3D6К6"3nln"3n4in"/nn"lnn"4inpKn"n8n"766"3 }676"3pKnn"36L6"`66"38nLn"3Lnn"3L6`6"3̖6XQ6"366"n0en",nhn"30enn"3hnn"3+n,n"XQ636"6̖6"66:ZIP14*d1*X12*d3*914*,kd5*Ȝ16*dd7*18*1d9*8c110*Ԕd11*p112* d13*)1141Ɵz>NAME1XTU(>VALUE"К6 }" } }2"3 }2Кn"XQ2XQ"3XQ36"3XQ"3XQ22"3n2%3< "36"32"3nXQ2"3nn"3366"6*6"3nRn"Rnn"3*66"66"~@6"6"3nrn"36~@6"rnVTn"3VTnn"3"6F6"F66"z6J\6"36z6"3nn"3nrHn"nn"nn"rHn*n":nvn"66"3J\66"3*n:n"366"6К6"3vnn"3nКn"366B|*,k1*,k2* ,k7*D[,k8*D[Ԕ9* Ԕ10*Ԕ15*Ԕ16"RZ2RZܒ1lMҗ">NAME"RZ2RZ |1J"(>VALUE"ܒ$m"RZ$mRZ"RZ$m$m"RZܒܒ B|IA*,k1*D[,k8*D[Ԕ9*Ԕ16"RZ2RZܒ1lMҗ"(>NAME"RZ2RZ |1ƟJ"(>VALUE"ܒ$m"RZܒܒ"RZ$mRZ"RZ$m$mH[qDIL64*A1*TaA2*A3*'A4*A5*4A6*lQA7*A8*A9*{A10*LA11*AA12*A13*A14*,kA15*dA16*1A17*ԔA18* A19*A32*|33* |46*Ԕ|47*1|48*d|49*,k|50*|51*|52*A|53*L|54*{|55*|56*|57*lQ|58*4|59*|60*'|61*|62*Ta|63*|641ڟ }"(>NAME"d4i1TaL"(>VALUE"1d|*D[A20*|A21*!A22*A23*$A24*\KA25*A26*A27*uA28*<A29*t;A30*A31*D[|45*||44*!|43*|42*$|41*\K|40*|39*|38*u|37*<|36*t;|35*|34"NL4iNL̖"4iNL4i"̖1"̖NL̖SJ*Ȝ91*92*8c93*8cp4*p5*Ȝp6"^R^R$m1pIȜ(>NAME10(>VALUE"^R2^R |&tE@aݒ&<@aݒ&@aݒ&$m&<$m&tE$m"^Rܒ^R2"^Rܒܒ"$mܒ"$m^R$mB|*,k1*d,k4*Ԕ,k6*D[,k8*D[Ԕ9*ԔԔ11*dԔ13*Ԕ1616hҗ"(>NAME" s2 sܒ1L"(>VALUE" s2 s |" sܒܒ"ܒ$m"$m s$m" s$m sH[DIL64Y*zA1*A2*bVA3*֛A4*JA5*&A6*2lA7*A8*A9*NAME"d4i1=L">VALUE"1d|*A20*8A21*}A22*rA23*A24*ZNA25*ΓA26*BA27*A28**dA29*A30*A31*|45*8|44*}|43*r|42*|41*ZN|40*Γ|39*B|38*|37**d|36*|35*|34"p4ip̖"4ip4i"̖1"̖p̖LBZIP20*(d1*RZ12*d3*14*&d5* 16*^Rd7*18*d9*2110*d11*jJ112*|d13*114*>d15*116*vBd17*t118*d19*J120"6"2"32n"2"3661#z(>NAME1pKLY(>VALUE"3A"32A2"3AnA2%3(< "3AA6"3A2A"3666"6̖6"3̖6XQ6"XQ636"6n2"6nhn"3hnn"n0en"30enn"336 6" 6\6"nn"3nn"nn"3\66"6$m6"3nLYn"LYn;n"3$m6'6"'6 6"x66"3;nn"3 6x6"nPn"3Pnܒn"36@a6"@a6|C6"6D6"3|C66"3un/n"3nln"ܒnun"/nn"lnn"4inpKn"К6 }6"3D6К6"3n4in"3 }6A6"766"3pKnAn"3Ann"3A67629,DIL42*X1*X2*@X3*xIX4*X5*X6* sX7*XX8*9X9*ȜX10*X11*8cX12*pX13*)X14*X15*X16*PSX17*X18*X19*|X20*0X21*0)22*|)23*)24*)25*PS)26*)27*)28*))29*p)30*8c)31*)32*Ȝ)33*9)34*X)35* s)36*)37*)38*xI)39*@)401 "(>NAME"d1L"(>VALUE"1d|"|9|9"1"|9"|9*)41*)42L[LHDIL68*A1*A2*TaA3*A4*'A5*A6*4A7*lQA8*A9*A10*{A11*LA12*AA13*A14*A15*,kA16*dA17*1A18*ԔA19*A32*A33*!|46*||47*D[|48* |49*Ԕ|50*1|51*d|52*,k|53*|54*|55*A|56*L|57*{|58*|59*|60*lQ|61*4|62*|63*'|641<x"(>NAME"zPdzP4i1L"(>VALUE"zP1zPd|* A20*D[A21*|A22*!A23*A24*$A25*\KA26*A27*A28*uA29*<A30*t;A31*|45*$|44*\K|43*|42*|41*u|40*<|39*t;|38*|37*|36*e|35*eA34"4i̖"zP4i4i"zP̖zP1"zP̖̖*|65*Ta|66*|67*|68|f\*d,k1*1,k2*1Ԕ 3*dԔ 4"8cpȜp""Ȝ98c9"38cp8c8c"ȜpȜ8c"Ȝ9ȜȜ"Ȝ'ȜP|1(>VALUE1җ(>NAME""Ȝ8c8c8c"Ȝ8cȜ'"38c8c8cȜ""ȜȜ8cȜ"ȜȜȜP"38cȜ8c9$)S*91* s92*X93*994*Ȝ95*96*8c97*p98*)99*910*911*p12*p13*)p14*pp15*8cp16*p17*Ȝp18*9p19*Xp20* sp21*p22"! L "L!1`(>NAME1 }((>VALUE"0!L"3Lu!u"2!!u"0LL'"0L'LP|"0! !"0L L"LLu"1LuLP"!!u<ADIL52*'X1*X2*4X3*lQX4*X5*X6*{X7*LX8*AX9*X10*X11*,kX12*dX13*1X14*ԔX15* X16*D[X17*|X18*!X19*X20*$X21*\KX22*X23*X24*uX25*<X26*<)27*u)28*)29*)30*\K)31*$)32*)33*!)34*|)35*D[)36* )37*Ԕ)38*1)39*d)40*,k)41*)42*)43*A)44*L)45*{)46*)47*)481("(>NAME1"(>VALUE"01d|"0"01"0"0d"0*lQ)49*4)50*)51*')52 ic-packageic-packageDual In LineDual In LineDual In LineDual In LineDual In LineDual In LineDual In LineDual In LineDual In LineDual In LineDual In LineDual In LineDual In LineDual In LineDual In LineDIL14/4Dual In LineDIL14/8Dual In LineDIL16/4Dual In Line 4 pins usedDIL16/8Dual In Line 8 pins usedDIL16/8BDual In Line 8 pins usedDual In LineDual In LineSingle In LineSingle In LineSingle In LineDual In Lineic-packageic-packageIC Packages an Sockeds

Created by librarian@cadsoft.deDual In Line PackageDual In Line PackageDual In Line PackageDual In Line PackageDual In Line PackageDual In Line PackageDual In Line PackageDual In Line Package SmallDual In Line PackageDual In Line PackageDual In Line PackageDual In Line PackagePLCC-S20Plastic Leaded Chip Carrier SockedPLCC-S28Plastic Leaded Chip Carrier SockedPLCC-S32Plastic Leaded Chip Carrier SockedPLCC-S44Plastic Leaded Chip Carrier SockedPLCC-S52Plastic Leaded Chip Carrier SockedPLCC-S68Plastic Leaded Chip Carrier SockedPLCC-S84Plastic Leaded Chip Carrier SockedDual In Line PackageDIL14/4Dual In Line PackageDIL14/8Dual In Line PackageDual In Line PackageDIL28-3Dual In Line Package SmallDual In Line Package SmallPin Grid ArrayMPGA-132Micro Pin Grid ArrayMPGA114Pin Grid Array

Source: MC68020UM.pdfPin Grid ArrayDual In Line PackagePGA68-NPin Grid ArrayMPGA-128Micro Pin Grid ArrayPin Grid ArrayMPGA-179Micro Pin Grid ArrayDIL28-4Dual In Line PackageDual In Line PackageSOCKED-06Dual In Line SockedSOCKED-08Dual In Line SockedSOCKED-14Dual In Line SockedSOCKED-16Dual In Line SockedSOCKED-18Dual In Line SockedSOCKED-20Dual In Line SockedSOCKED-22Dual In Line SockedSOCKED-24-4Dual In Line SockedSOCKED-24-6Dual In Line SockedSOCKED-28-6Dual In Line SockedSOCKED-32Dual In Line SockedSOCKED-36Dual In Line SockedSOCKED-40Dual In Line SockedDual In Line PackageSOJ4-36Special Small Outline PackageSOCKED-28-3Dual In Line Socked SmallSOCKED-22SDual In Line Socked SmallSOCKED-24SDual In Line Socked SmallDIL24-6Dual In Line Package 0.6 inchDIL28-6Dual In Line Package 0.6 inchDIL24-3Dual In Line Package 0.3 inchDIL22-3Dual In Line Package 0.3 inchDIL22-4Dual In Line 0.4 inchDIL24-4Dual In Line Package 0.4 inchDIL24-9Dual In Line Package 0.9 inchSingle In Line SockedSingle In Line SockedDIL16/8Dual In Line Package 8 pins usedDIL16/4Dual In Line Package 4 pins usedDual In Line PackageDIL06-4Dual In Line Package 0.4 inchDIL16/8BDual In Line Package 8 pins usedDual In Line, elongated padsSingle In Line SockedDual In Line PackageDual In LineSOCKED-04Dual In Line SockedSOCKED-22-4Dual In Line, 0.4 inch SockedDual In Line Package.͙